1 | Á¦¸ñ(Title) | Characterization of Nano-Grained ZnO Piezoelectric Thin Films Deposited under Various Sputtering Conditions | |
---|---|---|---|
ÀúÀÚ(Author) | Ruirui Zhang Eunju Lee Giwan Yoon | ||
¼ö·ÏÀú³Î(Journal) | Çѱ¹ÇؾçÁ¤º¸Åë½ÅÇÐȸ Á¦26ȸ 2009³â Ãß°èÁ¾ÇÕÇмú´ëȸ | ||
¿ø¹®¼ö·Ïó(Citation) | VOL 13 NO. 02 PP. 0428 ~ 0430 2009. 10 |
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